Research Scholar

Souvik Dubey

Copyright © Souvik Dubey. All rights reserved.

The pictures on the left shows a micro-motor which I designed using PolyMUMPs process. The size of the entire device was 200 micron X 200 micron. The actuation mechanism was designed based on electrostatic comb drive and the design was inspired from inch-worm movement. The dimensions of the comb drive actuator used for the motor was optimized for lower pull-in voltage. The design was simulated using Ansys student version. This project was designed for the course work Advanced MEMS class instructed by Professor Rahul Saini, an industrial expert in MEMS design at Zyvex Labs. My design was regarded as best design in the class.All the design documents and software are given bellow:

MEMS micro Motor